Trouble resolution
The degree of vacuum in the load lock chamber does not rise.
If the degree of vacuum changes when the sample change window is pressed by hand, dust may be attached to the sample change window O-ring. Please remove debris on the O-ring. Also, in cases of significant desorption from the sample, the degree of vacuum does not increase.
Load lock vacuum gauge does not display.
The amount of N2 in the load lock chamber is small, and discharge of the vacuum gauge is unlikely to occur. Please follow the steps below.
1.Set the [AUTO / MANU] selector switch to MANU.
2. Set the [MV] switch to CLOSE.
3. Set the [VV] switch to OPEN, and set to CLOSE after 5 seconds.
4. Set the [RV] switch to OPEN.
5. When the red LED on the back of the Pirani vacuum switch lights up, set the [RV] switch to CLOSE.
6. Press the [HV] switch on the Penning Gauge Controller.
7. When the vacuum display appears, set [MV] to OPEN.
8. Press the [AUTO RESET] switch and set the [AUTO / MANU] switch to AUTO.
After that, please use according to the usual procedure.
The AUTO lamp does not light.
Please follow the steps below.
1. Set the [AUTO / MANU] selector switch to MANU.
2. Set the [MV] switch to CLOSE.
3. Set the [RV] switch to OPEN.
4. When the red LED on the back of the Pirani vacuum switch lights up, set the [RV] switch to CLOSE.
5. Set the [RV] switch to CLOSE.
6. When the vacuum display appears, set [MV] to OPEN.
7. Press the [AUTO RESET] switch and set the [AUTO / MANU] switch to AUTO.
After that, please use according to the usual procedure.
A sample has dropped into the main chamber of TDS.
・Samples with no outgassing should be picked at overhaul. For example, sample heated to high temperature.
・There is no impact on the measurement. If the vacuum is not good after sample crash, or abnormal signals appear during stage baking, remove the sample as soon as possible.
The degree of vacuum in the TDS main chamber does not increase.
Degas for about 30 seconds to clean the vacuum gauge.
If it does not recover, you need to bake and clean the chamber.
A powder sample was scattered during purge.
・The load lock chamber needs to be disassembled and cleaned. If left unchecked, powder may stick to valves and cause leaks.
・Purge lines designed for powder samples can be added. Alternatively, the purge line can be connected in the order of purge valve → needle valve, and the needle valve can be used to purge without splashing by throttling the purge flow rate.
Power is not supplied to the IR controller
・It is likely that the flow rate or water pressure for the cooling water is insufficient, so check that.
・A fuse may be blown. In such a case the fuse (15 A) and the IR lamp must be replaced.
The ultimate vacuum is good but the vacuum draw is slow.
The performance of the rotary pump may be degraded.
Change the oil etc.
The guideline for oil change is once a year, but it may deteriorate quickly depending on the type and amount of desorbed gas.
Do I need to bake because I stopped the instrument?
Baking for 12 hours or more is recommended.
After lighting up the QMS filament after baking, wait at least 3 hours before making measurements.