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Overhaul

Overhaul

We offer maintenance and overhaul services for the instrument.
Please refer to the following table.

No.001 Pre-inspection

Implementation period Every year 
Standard working time 4.0H
Used / replacement parts Sample set for check
Remarks Check the current status of instrument.

No.002 IR lamp replacement

Implementation period Every year 
Standard working time 0.5H
Used / replacement parts IR lamp[1]
Remarks Parts used differ depending on instrument specifications.

No.003 Foreline trap element exchange

Implementation period Every year 
Standard working time 0.5H
Used / replacement parts element:20-H026-00-050[1can]
Remarks Parts used differ depending on instrument specifications.

No.004 Rotary pump oil change

Implementation period Every year 
Standard working time 2.0H
Used / replacement parts Rotary pump oil
Remarks The used parts differ depending on instrument specifications and manufacturer.

No.005 Sample stage replacement

Implementation period Every year 
Standard working time 2.0H
Used / replacement parts Quartz stage, thermocouple, ICF gasket
Remarks

Parts used differ depending on instrument specifications.

No.006 Cleaning in the heating chamber

Implementation period Every year 
Standard working time 0.5H
Used / replacement parts ICF gasket

No.007 Cleaning the load lock chamber

Implementation period Every two years
Standard working time 3.0H
Used / replacement parts ICF gasket

No.008 Sample transfer mechanism leaf spring exchange

Implementation period Every two years
Standard working time 1.0H
Used / replacement parts leaf spring, gasket

No.009 IR introduction mechanism polishing

Implementation period Every two years (According to contamination)
Standard working time 1.0H
Used / replacement parts gasket

No.010 TMP(2)Bearing replacement

Implementation period Every 3 years
Standard working time 3.0H
Used / replacement parts Bearing, gasket
Remarks Parts used differ depending on instrument specifications.

No.011 Oil mist filter replacement

Implementation period Every 4 years (According to contamination)
Standard working time 0.5H
Used / replacement parts filter

No.012 Gate valve replacement

Implementation period Every 4 years
Standard working time 4.0H
Used / replacement parts Gate valve, gasket
Remarks It depends on the frequency of use.

No.013 Rotary pump replacement

Implementation period Every 5 years
Standard working time 2.0H
Used / replacement parts Rotary pump, Anti-vibration rubber

No.014 Adjustment of resolution and mass axis of QMS

Implementation period Every year 
Standard working time 2.0H
Used / replacement parts Standard gas for adjustment

No.015 QMS ion source exchange

Implementation period Every two years (According to contamination)
Standard working time 2.0H
Used / replacement parts Ion source, gasket

No.016 Vacuum start up & Baking

Implementation period Every year 
Standard working time 2.0H

No.017 Performance check after overhaul

Implementation period Every year 
Standard working time 5.0H
Used / replacement parts Sample set for check
Remarks Be sure to carry out when maintenance is performed.

No.018 Hydrogen standard sample measurement

Implementation period Every year 
Standard working time 1.0H
Used / replacement parts Hydrogen standard sample
Remarks Perform after baking for 1 day or more.

No.019 Measurement for QMS characteristic correction

Implementation period Every year  
Standard working time 3.0H
Used / replacement parts Ne & Ar implant sample
Remarks Perform after baking for 1 day or more.
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