Overhaul
We offer maintenance and overhaul services for the instrument.
Please refer to the following table.
No.001 Pre-inspection
| Implementation period |
Every year |
|---|
| Standard working time |
4.0H |
|---|
| Used / replacement parts |
Sample set for check |
|---|
| Remarks |
Check the current status of instrument. |
|---|
No.002 IR lamp replacement
| Implementation period |
Every year |
|---|
| Standard working time |
0.5H |
|---|
| Used / replacement parts |
IR lamp［1］ |
|---|
| Remarks |
Parts used differ depending on instrument specifications. |
|---|
No.003 Foreline trap element exchange
| Implementation period |
Every year |
|---|
| Standard working time |
0.5H |
|---|
| Used / replacement parts |
element：20-H026-00-050［1can］ |
|---|
| Remarks |
Parts used differ depending on instrument specifications. |
|---|
No.004 Rotary pump oil change
| Implementation period |
Every year |
|---|
| Standard working time |
2.0H |
|---|
| Used / replacement parts |
Rotary pump oil |
|---|
| Remarks |
The used parts differ depending on instrument specifications and manufacturer. |
|---|
No.005 Sample stage replacement
| Implementation period |
Every year |
|---|
| Standard working time |
2.0H |
|---|
| Used / replacement parts |
Quartz stage, thermocouple, ICF gasket |
|---|
| Remarks |
Parts used differ depending on instrument specifications.
|
|---|
No.006 Cleaning in the heating chamber
| Implementation period |
Every year |
|---|
| Standard working time |
0.5H |
|---|
| Used / replacement parts |
ICF gasket |
|---|
No.007 Cleaning the load lock chamber
| Implementation period |
Every two years |
|---|
| Standard working time |
3.0H |
|---|
| Used / replacement parts |
ICF gasket |
|---|
No.008 Sample transfer mechanism leaf spring exchange
| Implementation period |
Every two years |
|---|
| Standard working time |
1.0H |
|---|
| Used / replacement parts |
leaf spring, gasket |
|---|
No.009 IR introduction mechanism polishing
| Implementation period |
Every two years (According to contamination) |
|---|
| Standard working time |
1.0H |
|---|
| Used / replacement parts |
gasket |
|---|
No.010 TMP（2）Bearing replacement
| Implementation period |
Every 3 years |
|---|
| Standard working time |
3.0H |
|---|
| Used / replacement parts |
Bearing, gasket |
|---|
| Remarks |
Parts used differ depending on instrument specifications. |
|---|
No.011 Oil mist filter replacement
| Implementation period |
Every 4 years (According to contamination) |
|---|
| Standard working time |
0.5H |
|---|
| Used / replacement parts |
filter |
|---|
No.012 Gate valve replacement
| Implementation period |
Every 4 years |
|---|
| Standard working time |
4.0H |
|---|
| Used / replacement parts |
Gate valve, gasket |
|---|
| Remarks |
It depends on the frequency of use. |
|---|
No.013 Rotary pump replacement
| Implementation period |
Every 5 years |
|---|
| Standard working time |
2.0H |
|---|
| Used / replacement parts |
Rotary pump, Anti-vibration rubber |
|---|
No.014 Adjustment of resolution and mass axis of QMS
| Implementation period |
Every year |
|---|
| Standard working time |
2.0H |
|---|
| Used / replacement parts |
Standard gas for adjustment |
|---|
No.015 QMS ion source exchange
| Implementation period |
Every two years (According to contamination) |
|---|
| Standard working time |
2.0H |
|---|
| Used / replacement parts |
Ion source, gasket |
|---|
No.016 Vacuum start up & Baking
| Implementation period |
Every year |
|---|
| Standard working time |
2.0H |
|---|
No.017 Performance check after overhaul
| Implementation period |
Every year |
|---|
| Standard working time |
5.0H |
|---|
| Used / replacement parts |
Sample set for check |
|---|
| Remarks |
Be sure to carry out when maintenance is performed. |
|---|
No.018 Hydrogen standard sample measurement
| Implementation period |
Every year |
|---|
| Standard working time |
1.0H |
|---|
| Used / replacement parts |
Hydrogen standard sample |
|---|
| Remarks |
Perform after baking for 1 day or more. |
|---|
No.019 Measurement for QMS characteristic correction
| Implementation period |
Every year |
|---|
| Standard working time |
3.0H |
|---|
| Used / replacement parts |
Ne & Ar implant sample |
|---|
| Remarks |
Perform after baking for 1 day or more. |
|---|
